Title:
基板をパターン化する方法、ならびにそのためのスタンプおよびパターン化システム
Document Type and Number:
Japanese Patent JP5333868
Kind Code:
B2
Abstract:
A method of patterning a substrate is disclosed. An ink material is chemisorbed to at least one region of a stamp and the chemisorbed ink material is transferred to a receptor substrate. The ink material has greater chemical affinity for the receptor substrate than for the at least one region of the stamp. A method of forming the stamp is also disclosed, as are the stamp and a patterning system.
Inventors:
Milward, Danby.
Application Number:
JP2010504227A
Publication Date:
November 06, 2013
Filing Date:
April 16, 2008
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B41F16/00; H01L21/027
Domestic Patent References:
| JP2008505475A |
Foreign References:
| WO2006003592A1 |
Attorney, Agent or Firm:
Nomura Yasuhisa
Yoshiyuki Osuga
Yoshiyuki Osuga