Title:
クライオポンプの再生方法
Document Type and Number:
Japanese Patent JP6552335
Kind Code:
B2
Inventors:
Naoto Suzuki
Yoshinobu Murayama
Shinji Furuya
Yoshinobu Murayama
Shinji Furuya
Application Number:
JP2015166002A
Publication Date:
July 31, 2019
Filing Date:
August 25, 2015
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F04B37/16; F04B37/08; F25B9/00
Domestic Patent References:
| JP9014133A | ||||
| JP6346848A |
Attorney, Agent or Firm:
Hideki Abe
Shigeo Ishijima
Shigeo Ishijima