Title:
湿度検出装置
Document Type and Number:
Japanese Patent JP7173661
Kind Code:
B2
Abstract:
To improve electrostatic breakdown resistance during manufacturing.SOLUTION: A humidity detector comprises a first semiconductor chip having a humidity detection part in which a humidity sensitive film is arranged between a pair of electrodes and a second semiconductor chip for performing signal processing based on a detected value of the humidity detector, in which the first semiconductor chip has an electrostatic discharge protection circuit connected to an input terminal or an output terminal to/from the humidity detection part.SELECTED DRAWING: Figure 4
Inventors:
Taketoshi Nakane
Application Number:
JP2018215851A
Publication Date:
November 16, 2022
Filing Date:
November 16, 2018
Export Citation:
Assignee:
MinebeaMitsumi Co., Ltd.
International Classes:
G01N27/22; H01L21/3205; H01L21/768; H01L21/822; H01L21/8234; H01L21/8248; H01L23/522; H01L27/04; H01L27/06
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Foreign References:
| US20100084706 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito