Title:
湿度センサ及びその製造方法
Document Type and Number:
Japanese Patent JP7120519
Kind Code:
B2
Abstract:
A humidity sensor including a lower electrode formed on a substrate, a plastic deformation inhibiting film formed on the lower electrode to inhibit plastic deformation of the lower electrode, a humidity sensitive film covering the lower electrode through the plastic deformation inhibiting film, and an upper electrode formed on the humidity sensitive film.
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Inventors:
Yuta Mitani
Application Number:
JP2018132189A
Publication Date:
August 17, 2022
Filing Date:
July 12, 2018
Export Citation:
Assignee:
MinebeaMitsumi Co., Ltd.
International Classes:
G01N27/22
Domestic Patent References:
| JP2012146449A | ||||
| JP2011196835A | ||||
| JP60166854A | ||||
| JP2013057616A | ||||
| JP63201559A | ||||
| JP2006133191A |
Foreign References:
| US20070132542 | ||||
| US4379406 | ||||
| US20150219581 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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