Title:
【発明の名称】アトミックプローブ顕微鏡及びこれに用いられるカンチレバーユニット
Document Type and Number:
Japanese Patent JP2900945
Kind Code:
B2
Inventors:
TODA AKITOSHI
MISHIMA SHUZO
MISHIMA SHUZO
Application Number:
JP4729690A
Publication Date:
June 02, 1999
Filing Date:
March 01, 1990
Export Citation:
Assignee:
ORINPASU KOGAKU KOGYO KK
International Classes:
G01B7/34; G01B21/30; G01Q60/24; G01Q70/02; H01J37/28; (IPC1-7): G01B7/34; G01B21/30
Domestic Patent References:
| JP1287403A |
Attorney, Agent or Firm:
Atsushi Tsuboi (2 outside)