Title:
【発明の名称】高純度薬品のための薬品補充システム
Document Type and Number:
Japanese Patent JPH09508208
Kind Code:
A
Abstract:
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Inventors:
Siegel, Stephen H
Noah, Craig M
Greg, John N
Noah, Craig M
Greg, John N
Application Number:
JP51963295A
Publication Date:
August 19, 1997
Filing Date:
January 18, 1995
Export Citation:
Assignee:
Advanced Delivery and Chemical Systems Incorporated
International Classes:
B01J4/00; B01L3/08; B67D7/02; B67D7/84; C23C16/44; C23C16/448; G01F23/60; C23C16/52; F17C1/00; F17C5/00; F17C5/02; F17C5/06; F17C6/00; F17C7/00; F17C9/00; F17C13/02; F17C13/04; G01F23/24; G01F23/26; G01F23/292; G01F23/74; G05D9/12; H01L21/205; H01L21/31; G01F23/70; G01F23/72; (IPC1-7): G01F23/74; C23C16/52; F17C13/02; G01F23/60; H01L21/205; H01L21/31
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)