Title:
【発明の名称】欠陥検査装置およびその方法
Document Type and Number:
Japanese Patent JP3085738
Kind Code:
B2
Inventors:
Akira Ono
Application Number:
JP18904491A
Publication Date:
September 11, 2000
Filing Date:
July 29, 1991
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01B11/24; (IPC1-7): G01B11/24
Domestic Patent References:
| JP5676004A | ||||
| JP5218163A |
Attorney, Agent or Firm:
Takehiko Suzue