Title:
【発明の名称】変位量及び変位速度の測定装置
Document Type and Number:
Japanese Patent JP2592254
Kind Code:
B2
Abstract:
PURPOSE:To achieve a higher accuracy of the apparatus, by a method wherein a laser light source and an interferometer are connected with an optical fiber to eliminate possible adverse effect on measuring accuracy even if any relative vibration occurs, which makes a necessary space as small as possible while accomplishing optical axis matching simply by adjustment of a measuring probe and a measuring reflection mirror. CONSTITUTION:A coherent light from a laser light source 1 is passed through an optical fiber 8a to be made parallel with a collimator lens 5a and divided into two polarized beam with a beam splitter 7a. Then, one of the beam is condensed with a condenser lens 6a and made incident into a measuring probe 15 through an optical fiber 8b. It is reflected back with a measuring reflector 3 fixed on an object to be measured through a collimator lens 5b, a beam splitter 7b, a wavelength plate 10b and a measuring reflector 3 and, then, made incident into a photointerferometer 14 through the other fiber 8b. The other light is made incident into a light attenuator 11 through a polarizer 9a and a wavelength plate 10a to adjust intensity level of light and, then, into a phase detector 13. Therefore, a displacement value and speed are calculated with the probe 15 and the reflector 3 made in the size of several 10mm.
More Like This:
| JPH0942976 | OPTICAL FIBER GYRO |
| JP3977078 | Interferer |
| JP2001165612 | LASER INTERFEROMETER |
Inventors:
INOME TETSUYA
Application Number:
JP16189087A
Publication Date:
March 19, 1997
Filing Date:
June 29, 1987
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
G01B9/02; G01B11/00; G01D5/26; G01P3/36; (IPC1-7): G01B9/02; G01B11/00; G01D5/26; G01P3/36
Domestic Patent References:
| JP4843656A | ||||
| JP6018727A | ||||
| JP61219803A |