Title:
【発明の名称】強誘電体薄膜素子及びその製造方法
Document Type and Number:
Japanese Patent JP2532381
Kind Code:
B2
Abstract:
Ferroelectric film device comprises a film of compsn. (PbxLay)(TizZrw)O3 where: x = 0.70-1.09, x+y = 0.9-1, z = 0.95-1 and w = 0; or x = 1, y = 0, z = 0.45-1 (not 1) and z+w = 1; or x = 0.83-1 (not 1), y+x = 1, z = 0.5-1 (not 1) and z+w = 0.96-1. The film is deposited on a substrate, pref. MgO and two electrodes are attached. At least 75% of the polarisation axes in the film are oriented in direction nearly perpendicular to the film surface.
Inventors:
IIJIMA KENJI
TOMITA YOSHIHIRO
TAKAYAMA RYOICHI
UEDA ICHIRO
TOMITA YOSHIHIRO
TAKAYAMA RYOICHI
UEDA ICHIRO
Application Number:
JP4656086A
Publication Date:
September 11, 1996
Filing Date:
March 04, 1986
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L41/187; B32B9/00; C04B41/52; C04B41/89; C23C14/08; C23C14/32; C23C14/34; C30B28/12; C30B29/32; G01J5/02; G01J5/34; H01B3/00; H01L37/02; (IPC1-7): C23C14/08; C23C14/34; G01J5/00; H01L41/18; H01B3/12
Domestic Patent References:
| JP60172103A | ||||
| JP60171304A |
Attorney, Agent or Firm:
Tomoyuki Takimoto