【発明の名称】加熱方法及び加熱装置

Title:

【発明の名称】加熱方法及び加熱装置

Document Type and Number:

Japanese Patent JP2778598

Kind Code:

B2

Inventors:

SHIRAKAWA HIDEKAZU
MATSUMURA KIMIHARU
ETO AKINOBU

Application Number:

JP16108789A

Publication Date:

July 23, 1998

Filing Date:

June 23, 1989

Export Citation:

Assignee:

TOKYO EREKUTORON KK

International Classes:

H05B3/10; H01L21/205; H01L21/31; (IPC1-7): H05B3/10

Domestic Patent References:

JP62185329A
JP63105486A

Attorney, Agent or Firm:

Moriya Kazuo

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