Title:
【発明の名称】高周波誘導結合プラズマ質量分析計
Document Type and Number:
Japanese Patent JP2953010
Kind Code:
B2
Abstract:
PURPOSE:To improve the ion transmissivity and the analysis sensitivity by applying a specific voltage to a gate valve to give the function as an ion lens to the gate valve, as well as insulating electrically the gate valve from a center chamber and a fore chamber. CONSTITUTION:The first insulator 22a to insulate a center chamber 13 and a gate valve 21 electrically, the second insulator 22b to insulate a fore chamber 11 and the gate valve 21 electrically, and a variable voltage power source 23 to apply the voltage to the gate valve 21 are provided. And, while the gate valve 21 is insulated from the center chamber 13 and the fore chamber 11 electrically, a specific voltage is applied to the gate valve 21 to give the function as an ion lens to the gate valve 21. As a result, the gate valve 21 is made function as an ion lens, and the effect same as shortening the distance between a pullout electrode 14a and ion lenses 14b to 14e can be obtained. Consequently, the ion transmissivity is improved and the analysis sensitivity can be also improved.
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Inventors:
YAMANAKA KAZUO
SAKATA KENICHI
SAKATA KENICHI
Application Number:
JP25960190A
Publication Date:
September 27, 1999
Filing Date:
September 28, 1990
Export Citation:
Assignee:
YOKOKAWA DENKI KK
International Classes:
G01N27/68; H01J47/26; H01J49/06; H01J49/10; H01J49/26; (IPC1-7): H01J49/26; H01J49/06
Domestic Patent References:
| JP4933099A | ||||
| JP2132747A | ||||
| JP6420670U |
Attorney, Agent or Firm:
Hirofumi Higashino