Title:
【発明の名称】質量センサおよび質量検出方法
Document Type and Number:
Japanese Patent JP3298897
Kind Code:
B2
Abstract:
A piezoelectric/electrostrictive device is provided in which a connection plate whose one end in the longitudinal direction is held by two diaphragms and whose other end is held by two other diaphragms is spanned between bottoms of faced concave portions formed on a substrate, and piezoelectric elements are arranged on at least a part of at least one-side plane surface of each of the diaphragms, and the diaphragms are connected with the sides of the concave portions in at least the direction for the diaphragms to hold the connection plate, and a fixing plate is connected to the connection plate so that the longitudinal direction of the fixing plate becomes parallel with the direction for the diaphragms to hold the connection plate. A displacement of the fixing plate generated by applying a voltage to the piezoelectric element is utilized or an electromotive force of the piezoelectric element based on a displacement of the fixing plate is utilized. The piezoelectric/electrostrictive device is preferably used as a positioning- or angle-adjustment mechanism of an optical unit or precision unit, a vibrator or resonator for communication or motive power, an oscillator, a discriminator, an ultrasonic sensor, or an acceleration sensor because the device is able to convert electric energy into mechanical energy such as a mechanical displacement, force, or vibration and vice versa.
Inventors:
Yukihisa Takeuchi
Takao Ohnishi
Koji Kimura
Takao Ohnishi
Koji Kimura
Application Number:
JP51533399A
Publication Date:
July 08, 2002
Filing Date:
September 04, 1998
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
B06B1/06; G01G3/16; G01H11/08; G01P15/09; G02B26/02; H01L41/09; H01L41/113; H01L41/187; G01N35/00; (IPC1-7): G01G3/13; G01G3/16; G01N5/02
Domestic Patent References:
| JP61231419A | ||||
| JP63200028A | ||||
| JP6264934A |
Other References:
【文献】欧州特許出願公開614087(EP,A2)
【文献】欧州特許出願公開152700(EP,A2)
【文献】英国特許出願公開2236855(GB,A)
【文献】欧州特許出願公開152700(EP,A2)
【文献】英国特許出願公開2236855(GB,A)
Attorney, Agent or Firm:
Ippei Watanabe