【発明の名称】レジストパタ-ンの形成方法

Title:

【発明の名称】レジストパタ-ンの形成方法

Document Type and Number:

Japanese Patent JP2502564

Kind Code:

B2

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Inventors:

WATANABE HISASHI
TODOKORO YOSHIHIRO
HASEGAWA MASAZUMI
FUKUDA SANJU

Application Number:

JP3849887A

Publication Date:

May 29, 1996

Filing Date:

February 20, 1987

Export Citation:

Assignee:

MATSUSHITA DENSHI KOGYO KK
TOSOO KK

International Classes:

G03F7/26; G03C1/00; G03C5/00; G03F7/00; G03F7/11; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/11; G03F7/26

Domestic Patent References:

JP5796333A
JP59173742A

Attorney, Agent or Firm:

Tomoyuki Takimoto

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