Title:
【発明の名称】微小流量制御弁
Document Type and Number:
Japanese Patent JP2999429
Kind Code:
B2
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Inventors:
Kazuhiro Sugata
Hiroshi Tomita
Hiroshi Tomita
Application Number:
JP7941097A
Publication Date:
January 17, 2000
Filing Date:
March 31, 1997
Export Citation:
Assignee:
CKD Corporation
International Classes:
F16K7/16; F16K1/12; F16K1/52; (IPC1-7): F16K1/52; F16K7/16
Attorney, Agent or Firm:
Takashi Tomizawa (2 outside)