Title:
【発明の名称】光学的変位量測定装置
Document Type and Number:
Japanese Patent JP2676290
Kind Code:
B2
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Inventors:
Yuji Kobayashi
Application Number:
JP2187792A
Publication Date:
November 12, 1997
Filing Date:
January 10, 1992
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01B11/00; G01B11/16; G01P3/38; (IPC1-7): G01B11/00; G01B11/16; G01P3/38
Domestic Patent References:
| JP3175303A | ||||
| JP59222709A |
Attorney, Agent or Firm:
Shin Koizumi (3 others)