Title:
【発明の名称】改修型低温拡散ポンプ
Document Type and Number:
Japanese Patent JPH08510525
Kind Code:
A
Abstract:
PCT No. PCT/EP94/01637 Sec. 371 Date Nov. 20, 1995 Sec. 102(e) Date Nov. 20, 1995 PCT Filed May 13, 1994 PCT Pub. No. WO94/28314 PCT Pub. Date Dec. 8, 1994The present invention relates to a pumping device which is suitable for pumping mixtures of gases at cryogenic temperatures which is a combination of a cryogenic diffusion pump and a thermal gradient barrier diffusion pump. Specifically, the pumping device comprises an elongate body of material capable of withstanding cryogenic temperatures and of sustaining an axial temperature gradient in use. The elongate body has an inlet for the gas mixture and an outlet for one or more gases to be pumped, wherein the outlet is filled with a porous barrier through which gases must pass to exit the device. The porous body has a heating means disposed at its outlet side.
Inventors:
Hemelich, Johann Ludwig
Milverton, Paul
Milverton, Paul
Application Number:
JP50019394A
Publication Date:
November 05, 1996
Filing Date:
May 13, 1994
Export Citation:
Assignee:
European Atomic Energy Community (Euratom)
International Classes:
F04B37/06; F04F9/00; (IPC1-7): F04F9/00; F04B37/06
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)