Title:
【発明の名称】回転式基板乾燥方法および回転式基板乾燥装置
Document Type and Number:
Japanese Patent JP3330002
Kind Code:
B2
Inventors:
Mitsuaki Hoya
Application Number:
JP31196195A
Publication Date:
September 30, 2002
Filing Date:
November 30, 1995
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B08B11/04; F26B5/08; F26B5/14; F26B17/30; F26B25/00; H01L21/304; (IPC1-7): F26B5/08; B08B11/04; F26B5/14; F26B25/00; H01L21/304
Domestic Patent References:
| JP7245644A | ||||
| JP729866A | ||||
| JP6151405A | ||||
| JP7211686A | ||||
| JP283927A | ||||
| JP63185029A | ||||
| JP59100540A |
Attorney, Agent or Firm:
Kenji Yoshida (2 outside)