Title:
【発明の名称】半導体センサ、伝送器及びプロセス状態表示装置
Document Type and Number:
Japanese Patent JP2822816
Kind Code:
B2
Inventors:
Tomoyuki Tobita
Yoshimi Yamamoto
Nagasu Akira
Teruo Kobayashi
Yoshimi Yamamoto
Nagasu Akira
Teruo Kobayashi
Application Number:
JP29112692A
Publication Date:
November 11, 1998
Filing Date:
October 29, 1992
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01L13/02; G01L27/00; (IPC1-7): G01L27/00
Domestic Patent References:
| JP4194718A | ||||
| JP257040U |
Attorney, Agent or Firm:
Ogawa Katsuo