Title:
TREATMENT SYSTEM OF CIRCUIT PANEL LAYER
Document Type and Number:
Japanese Patent JPH0661332
Kind Code:
A
Abstract:
PURPOSE: To separate a panel being treated from a contamination source by using a clean-room-class, isolated enclosure that is made of air. CONSTITUTION: A clean room environment is provided close to a circuit card and a circuit board being treated. Especially, the clean room environment is provided at a clean-room-class, air enclosure 11 essentially without any contamination, thus avoiding expenses and difficulties for providing a clean room that consists of a large solid foot (30.48 cm) in a clean room state that is away from the closest card or board by several tens of feet (at least 3 m) and hence isolating a panel being treated from a contamination source that is generated by a human being.
Inventors:
TOOMASU PATORITSUKU DAFUII
RUISU CHIYAARUZU HEKUTO
MERITSUTO PURESUTON SARUJIYAA
AANSUTO EMIRU SUIIRE
MAAKU BUINSENTO PIASON
ROORENSU EDOWAADO UIRIAMUZU
RUISU CHIYAARUZU HEKUTO
MERITSUTO PURESUTON SARUJIYAA
AANSUTO EMIRU SUIIRE
MAAKU BUINSENTO PIASON
ROORENSU EDOWAADO UIRIAMUZU
Application Number:
JP11485393A
Publication Date:
March 04, 1994
Filing Date:
May 17, 1993
Export Citation:
Assignee:
IBM
International Classes:
B23P21/00; B25H3/02; B65G49/07; H01L21/00; H01L21/673; H01L21/677; H01L21/683; H05K3/00; (IPC1-7): H01L21/68; B23P21/00; B25H3/02
Attorney, Agent or Firm:
Koichi Tonmiya (5 people outside)