Title:
【発明の名称】ウエブの接合システム
Document Type and Number:
Japanese Patent JP2656777
Kind Code:
B2
Inventors:
YAMAZAKI TAKESHI
TAKADA NAOKI
FUKUHARA SANSHIRO
TAKADA NAOKI
FUKUHARA SANSHIRO
Application Number:
JP33486587A
Publication Date:
September 24, 1997
Filing Date:
December 29, 1987
Export Citation:
Assignee:
FUJI SHASHIN FUIRUMU KK
International Classes:
G03C1/00; B65H19/10; B65H35/00; G03C11/00; (IPC1-7): G03C1/00; B65H19/10; B65H35/00
Domestic Patent References:
| JP55125178A | ||||
| JP5992851A |
Attorney, Agent or Firm:
Kenzo Matsuura