PURPOSE: To obtain a thin ceramic film having enhanced adhesive strength by successively forming a thin pure metal film using the same metallic element as a thin oxide film and a thin nitride film using the same metallic element as the thin oxide film on the surface of a substrate when the thin oxide film is formed on the surface of the substrate.
CONSTITUTION: When a thin oxide film 2 (e.g. Al2O3) is formed on the surface of a substrate 1 made of a metallic material, a thin pure metal film 3 (e.g. Al) using the same metallic element as the thin oxide film is first formed as an undercoat layer on the surface of the substrate 1. A thin nitride film 4 (e.g. AlN) using the same metallic element as the thin oxide film 2 is further formed on the surface of the thin pure metal film 3 and then the thin oxide film 2 is formed on the thin nitride film 4 to obtain the objective thin ceramic film having enhanced adhesive strength without deteriorating electric insulating property or wear resistance.
KURI YUUJI
WATANABE MICHIO
