Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PRODUCTION OF MAGNETO-RESISTANCE EFFECT HEAD
Document Type and Number:
Japanese Patent JPH076330
Kind Code:
A
Abstract:

PURPOSE: To prevent the generation of dissolution and corrosion in a washing stage for FeMn which is an antiferromagnetic material layer by using weakly alkaline washing water in a washing stage in production of the MR head.

CONSTITUTION: After the antiferromagnetic material layer 16 consisting of the FeMn is formed on a magneto-resistance effect layer (MR layer) 13, a resist 15 is removed and the antiferromagnetic material layer 16 is patterned by a lift-off method. The antiferromagnetic material layer is then subjected to the washing stage after the end of the patterning and thereafter, an electrode layer 17 consisting of W, etc., is formed on the antiferromagnetic material layer 16 and is similarly washed after the patterning. The FeMn which is the essential component of the antiferromagnetic material layer 16 is easily attacked by ultrapure water, concd. ultrapure water, pure water, city water, etc., but is relatively strong to alkalis. Then, the corrosion thereof is prevented by executing washing by using the weakly alkaline washing water of 7 to 10 pH.


Inventors:
MATSUZAKI MIKIO
IWAI YUZURU
Application Number:
JP16595093A
Publication Date:
January 10, 1995
Filing Date:
June 14, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TDK CORP
International Classes:
G11B5/39; H01F41/14; H01F41/34; H01L43/08; (IPC1-7): G11B5/39; H01L43/08
Domestic Patent References:
JPH0567314A1993-03-19
JPH0569560A1993-03-23
JPS53121006A1978-10-23
Attorney, Agent or Firm:
Keiichi Yamamoto