Title:
【発明の名称】高能力の物理的吸着剤からなる流体貯蔵ならびに搬送システム
Document Type and Number:
Japanese Patent JPH11511233
Kind Code:
A
Abstract:
An adsorption-desorption apparatus, for storage and dispensing of a sorbable gas, wherein a physical sorbent medium bearing the adsorbed gas to be selectively dispensed is delivered by pressure differential desorption and/or thermal desorption of the sorbate gas from the sorbent material. The sorbent material preferably comprises a material which is characterized by a Sorbent Working Capacity, measured for arsine at 40 Torr and at 650 Torr, of at least 100 grams arsine per liter of bed of the sorbent material, e.g., a sorbent material having the adsorption isotherm characteristic of curve A in Figure 1.
Inventors:
Glenn M. Tom
W. Curl. Hollander
James V. McManus
W. Curl. Hollander
James V. McManus
Application Number:
JP54070197A
Publication Date:
September 28, 1999
Filing Date:
May 20, 1997
Export Citation:
Assignee:
Advanced Technology Materials Incorporated
International Classes:
B01D53/02; B01D53/04; B01J20/20; F17C7/04; F17C11/00; (IPC1-7): F17C11/00; B01D53/02; B01J20/20
Attorney, Agent or Firm:
Yoshihisa Oshida