PURPOSE: To prevent adhesion of detrimental fine particles in cleaning liquid to a substrate and to retard readhesion thereof in following process by adding a substance for controlling three-dimensional repellency, within a specified concentration range, to the cleaning solution.
CONSTITUTION: In order to prevent of uppress adhesion of fine particles 2 in a cleaning solution to a substrate 1, a substance for controlling three-dimensional repellecy is added to the solution within a concentration range of 10-7-10-3mol/l. Preferable, the substance for controlling the three-dimensional repellency has hydrophilic group and hydrophobic group in one molecule. For example, polyethylene oxido, polyethylene glycol, poly 12-hydroxystearic acid, polydimethylaminomethacrylate, polyarylamido, hydroxylpropyl cellulose, ethylhydroxyethyl cellulose, hydroxyethyl cellulose, or polyvinyl alcohol is used.
SAITO AKIO
ITO HARUO
OKA HITOSHI
