PURPOSE: To reduce occurrence of a pseudo-defect and to improve the rate of recognition of a defect in visual inspection of a semiconductor chip.
CONSTITUTION: Gray information on a plurality of semiconductor chips 4 which are judged as good products visually and different in a tint of the surface from one another is stored beforehand in a second image memory 11. Next, the gray information being stored in the second image memory 11 and most resemblant to the gray information on a semiconductor chip 4 to be inspected is selected by an image selecting part 12, the gray information on the semiconductor chip 4 to be inspected and the gray information selected by the image selecting part 12 are compared with each other in an image comparing part 13 and thereby it is inspected whether the external appearance of the semiconductor chip to be inspected is good or bad.
FUJIMURA YUZO
SHIROUCHI YUICHI
