Title:
【発明の名称】不活性ガスを精製してそこからルイス酸および酸化剤不純物を除去するための方法、組成物および装置
Document Type and Number:
Japanese Patent JPH05505337
Kind Code:
A
Inventors:
Tom M. Glenn M
Brown, Duncan W
Brown, Duncan W
Application Number:
JP50571690A
Publication Date:
August 12, 1993
Filing Date:
March 30, 1990
Export Citation:
Assignee:
Millipore Investment Holding's Limited
International Classes:
B01D53/02; B01D53/04; B01D53/14; B01D53/28; B01J20/02; B01J20/32; H01J1/56; H01J7/18; (IPC1-7): B01J20/02; B01D53/02; B01D53/14
Attorney, Agent or Firm:
Heiyoshi Odashima