Title:
【発明の名称】基板に設けられた層の厚さを決定する方法
Document Type and Number:
Japanese Patent JP2002530632
Kind Code:
A
Abstract:
According to the inventive method for determining the thickness of at least one layer provided on a substrate, the measurement can be constructed simply and reliably and a reliable measuring result can be obtained by measuring reflection-and/or transmission light intensity values of zero order in dependence on the wavelength and calculating said reflection-and/or transmission light intensity values using an iteration model which is dependent on the individual layer parameters. The layer parameters are altered in order to introduce a consistency between the measured values and the calculated values and the substrates have geometrical structures whose geometrical dimensions are used as further parameters of the iteration model. The inventive method also provides a means of determining the geometry of structures in the substrate, for example the depth, width and the repetition interval of grooves in a blank for geometrical storage media, such as CDs.
Inventors:
Rolf Hert Ring
Wolfgang Schaudich
Vilbert Windern
Wolfgang Schaudich
Vilbert Windern
Application Number:
JP2000582762A
Publication Date:
September 17, 2002
Filing Date:
November 06, 1999
Export Citation:
Assignee:
Steerg Hamatehi Actien Gezel Shaft
International Classes:
B29D17/00; G01B11/06; G01B11/22; G11B7/26; H01L21/66; (IPC1-7): G01B11/06
Attorney, Agent or Firm:
Toshio Yano (4 outside)