Title:
【発明の名称】スパツタリング用ターゲットの製造方法
Document Type and Number:
Japanese Patent JP2952853
Kind Code:
B2
Inventors:
YOSHINARI AKIRA
FUJII NORIHISA
MORIMOTO SHOGO
KODAMA HIDEYO
ERA MASAYUKI
OOMORI YOSHIBUMI
FUJII NORIHISA
MORIMOTO SHOGO
KODAMA HIDEYO
ERA MASAYUKI
OOMORI YOSHIBUMI
Application Number:
JP11812688A
Publication Date:
September 27, 1999
Filing Date:
May 17, 1988
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
B21B1/40; B21J1/04; B22D7/06; B22D27/04; B22D27/20; B22D29/00; C22C1/02; C23C14/34; (IPC1-7): B22D27/04; B21J1/04; B22D7/06; B22D27/20; B22D29/00; C22C1/02; C23C14/34
Domestic Patent References:
| JP581055A | ||||
| JP5665912A | ||||
| JP5853370A | ||||
| JP503022A | ||||
| JP62263803A | ||||
| JP63238268A | ||||
| JP452882B1 | ||||
| JP3614682B1 |
Attorney, Agent or Firm:
Hiroshi Nakamoto (1 outside)