Title:
【発明の名称】非蒸発型ゲッタ材料の担持された薄層の製造方法及びそれにより製造されたゲッタ装置
Document Type and Number:
Japanese Patent JP3419788
Kind Code:
B2
Abstract:
A method for forming a supported thin layer of non-evaporable getter (NEG) material and a getter device formed thereby are provided. A suspension comprised of non-evaporable getter (NEG) material particles in a dispersing medium is prepared. The NEG material particles in the suspension have a particle size not greater than about 150 mu m. The dispersing medium has an aqueous, alcoholic, or hydroalcoholic base and contains not more than about 1 wt % of organic compounds having a boiling temperature of at least about 250 DEG C. The ratio of the weight of the NEG material particles to the weight of the dispersing medium is between about 4:1 and about 1:1. A layer of the suspension is deposited on a carrier by a serigraphic technique. Next, the deposited layer is dried to evaporate volatile components of the dispersing medium and thereby form a dried deposit. Finally, the dried deposit is sintered under vacuum at a temperature between about 800 DEG C. and 1000 DEG C. with a surface of the dried deposit covered with a refractory material to inhibit scaling. Getter devices formed in accordance with this method also are provided.
Inventors:
Corazza, Alessio
Boffito, Claudio
Garitognotta, Alessandro
Kluberg, Richard
Ferris, Michael El.
Boffito, Claudio
Garitognotta, Alessandro
Kluberg, Richard
Ferris, Michael El.
Application Number:
JP50676198A
Publication Date:
June 23, 2003
Filing Date:
July 21, 1997
Export Citation:
Assignee:
Saes Getters Sochieta Per Azioni
International Classes:
B01J20/02; H01J7/18; H01J9/39; (IPC1-7): H01J7/18
Domestic Patent References:
| JP103850A |
Attorney, Agent or Firm:
Takashi Ishida (4 others)