【発明の名称】釣り合いのとれた蒸気流を供給する方法およびそれを実施するための装置

Title:

【発明の名称】釣り合いのとれた蒸気流を供給する方法およびそれを実施するための装置

Document Type and Number:

Japanese Patent JP2904920

Kind Code:

B2

Abstract:

PCT No. PCT/NL90/00042 Sec. 371 Date Nov. 19, 1991 Sec. 102(e) Date Nov. 19, 1991 PCT Filed Apr. 30, 1990 PCT Pub. No. WO90/12900 PCT Pub. Date Nov. 1, 1990.Method for providing a proportioned gas flow of triisobutylaluminum from liquid triisobutylaluminum having isobutene admixed therein. The liquid is preheated sufficiently to evaporate the isobutene therefrom but leaving the triisobutylaluminum substantially in liquid phase. The vaporized isobutene is separated from the liquid triisobutylaluminum, and subsequently the triisobutylaluminum from which isobutene has been removed is evaporated. Preheating is conducted at a temperature of 30 DEG -40 DEG C. The evaporation of liquid triisobutylaluminum is conducted at a temperature of 40 DEG -60 DEG C.

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Inventors:

GURANEMAN ERUNSUTO HENDORIKU AUGUSUTO
KUAKUMAN ROORENSU FURANSU TAAMUSUN
PIIKAARU HANSU UIREMU
SURUIIKU BODEUIIN GIISUBERUTO

Application Number:

JP50566190A

Publication Date:

June 14, 1999

Filing Date:

April 03, 1990

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Assignee:

EI ESU EMU YOOROTSUPA BV

International Classes:

C23C16/20; C23C16/44; C23C16/448; H01L21/205; H01L21/28; H01L21/285; (IPC1-7): C23C16/20; C23C16/44

Attorney, Agent or Firm:

Heiyoshi Odashima

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