Title:
【発明の名称】光電子放出装置とそれを用いた微粒子の荷電方法
Document Type and Number:
Japanese Patent JP3046085
Kind Code:
B2
Inventors:
Toshiaki Fujii
Kazuhiko Sakamoto
Kazuhiko Sakamoto
Application Number:
JP2268591A
Publication Date:
May 29, 2000
Filing Date:
January 24, 1991
Export Citation:
Assignee:
EBARA Research Institute, Ltd.
International Classes:
B01J19/12; B03C3/38; G01N15/02; G21K5/00; (IPC1-7): B01J19/12; G01N15/02; G21K5/00
Domestic Patent References:
| JP2303558A | ||||
| JP63147566A |
Attorney, Agent or Firm:
Katsura Yoshimine (1 person outside)