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Patent Searching and Data


Title:
FILM-THICKNESS MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH074920
Kind Code:
A
Abstract:

PURPOSE: To improve the measuring accuracy of the thickness of a film by making the amount of reflected light constant even if an object to be measured is slightly inclined.

CONSTITUTION: This device is constituted of a stage 5, which mounts an object to be measured 1 and has the mounting surface whose inclination can be changed, a light source, which emits incident light 2 on the object to be measured 1, a photodetector 4, which detects reflected light 3 from the object to be measured 1, and a feedback circuit 6, which keeps the amount of the reflected light constant by feeding back the fluctuating part of the amount of the reflected light caused by the movement of the stage 5 and changing the inclination of the stage 5.


Inventors:
NAKAJIMA KOKICHI
Application Number:
JP14724793A
Publication Date:
January 10, 1995
Filing Date:
June 18, 1993
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G01B11/06; (IPC1-7): G01B11/06
Domestic Patent References:
JPH04172207A1992-06-19
Attorney, Agent or Firm:
Teiichi