Title:
【発明の名称】ハーメティックシールされた空洞を基板中に作製するためのプロセス
Document Type and Number:
Japanese Patent JPH11510638
Kind Code:
A
Abstract:
A field emission device (10) is made with a lateral emitter (100) substantially parallel to a substrate (20) and with a simplified anode stucture (70). The lateral-emitter field-emission device has a thin-film emitter cathode (100) which has a thickness not exceeding several hundred angstroms and has an emitting blade edge or tip (110) having a small radius of curvature. The anode's top surface is precisely spaced apart from and below the plane of the lateral emitter and receives electrons emitted by field emission from the blade edge or tip of the lateral-emitter cathode, when a suitable bias voltage is applied. A fabrication process is disclosed using process steps (S1-S18) similar to those of semiconductor integrated circuit fabrication to produce the novel devices and their arrays. Various embodiments of the fabrication process allow the use of conductive or insulating substrates (20) and allow fabrication of devices having various functions and complexity. The anode (70) is simply fabricated, without the use of prior-art processes which formed a spacer made by a conformal coating. In a preferred fabrication process for the simplified anode device, the following steps are performed: an anode film (70) is deposited; an insulator film (90) is deposited over the anode film; an ultra-thin conductive emitter film (100) is deposited over the insulator and patterned; a trench opening (160) is etched through the emitter and insulator, stopping at the anode film, thus forming and automatically aligning an emitting edge of the emitter; and means are provided for applying an electrical bias to the emitter and anode, sufficient to cause field emission of electrons from the emitting edge of the emitter to the anode. The anode film may comprise a phosphor (75) for a device specially adapted for use in a field emission display. The fabrication process may also include steps to deposit additional insulator films (130) and to deposit additional conductive films for control electrodes (140), which are automatically aligned with the emitter blade edge or tip (110).
Inventors:
Potter, Michael, Day.
Application Number:
JP53673596A
Publication Date:
September 14, 1999
Filing Date:
May 31, 1996
Export Citation:
Assignee:
Advanced Vision Technologies, Inc.
International Classes:
H01J9/39; H01J1/304; H01J3/02; H01J7/18; H01J9/02; H01J9/40; (IPC1-7): H01J9/40; H01J1/30; H01J7/18; H01J9/02; H01J9/39
Attorney, Agent or Firm:
Akira Asamura (3 outside)