Title:
【発明の名称】チャンバーに気体を供給するためのプロセスおよびそのようなチャンバーにおける雰囲気の所定の成分の含有量を調節する方法
Document Type and Number:
Japanese Patent JP2001501008
Kind Code:
A
Abstract:
PCT No. PCT/FR97/02330 Sec. 371 Date Aug. 20, 1998 Sec. 102(e) Date Aug. 20, 1998 PCT Filed Dec. 17, 1997 PCT Pub. No. WO98/28102 PCT Pub. Date Jul. 2, 1998The invention relates to a process for supplying gas to a chamber which is supplied via a supply network which includes at least one primary line connected in its upstream part to a supply of the said gas, and at least two respective secondary lines connected to the primary lines, being characterized in that the content of a given component of the atmosphere in the chamber is measured at least at one point in the chamber, the measured content is compared with at least one predetermined control value for the content of the said component of the atmosphere in the chamber at the said point and, where necessary, the pressure of the gas at one of the points in the network is varied, depending on the result of this comparison.
Inventors:
Retirumi, Marc
Piogel, Frederick
Piogel, Frederick
Application Number:
JP52845498A
Publication Date:
January 23, 2001
Filing Date:
December 17, 1997
Export Citation:
Assignee:
Rail Liquide Society Anonymous Pool Retude e Rex Prowation de Procede Georges Claude
International Classes:
B23K31/02; B23K1/008; G05D11/13; (IPC1-7): G05D11/13; B23K31/02
Domestic Patent References:
| JPH06226439A | 1994-08-16 | |||
| JPH0628221Y2 | 1994-08-03 | |||
| JPH0525740Y2 | 1993-06-29 | |||
| JPH04200893A | 1992-07-21 | |||
| JPH04356349A | 1992-12-10 | |||
| JPH09186448A | 1997-07-15 | |||
| JPH06120655A | 1994-04-28 | |||
| JPH06344176A | 1994-12-20 | |||
| JPH0846346A | 1996-02-16 |
Foreign References:
| US5440101A | 1995-08-08 |
Attorney, Agent or Firm:
Takehiko Suzue (4 outside)