Title:
【発明の名称】真空応用のための堅く薄いウィンドウ
Document Type and Number:
Japanese Patent JP2000517461
Kind Code:
A
Abstract:
A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.
Inventors:
Meyer, Glenn, A.
Cielo, Dino, Earl.
Myers, Booth, Earl.
Chen, Hao Lin
Wakalopros, George
Cielo, Dino, Earl.
Myers, Booth, Earl.
Chen, Hao Lin
Wakalopros, George
Application Number:
JP50708498A
Publication Date:
December 26, 2000
Filing Date:
July 18, 1997
Export Citation:
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
American International Technologies, Inc.
American International Technologies, Inc.
International Classes:
E03D5/10; G01T7/00; H01J5/18; H01J33/04; H01L21/302; H01L27/14; (IPC1-7): H01J5/18; G01T7/00; H01L21/3065; H01L27/14
Attorney, Agent or Firm:
Yasuo Ishikawa (1 outside)