Title:
【発明の名称】真空装置用回転式遮光器及びこれを使用した真空装置
Document Type and Number:
Japanese Patent JP2937962
Kind Code:
B2
Inventors:
TAKAHASHI HIROSHI
Application Number:
JP24956197A
Publication Date:
August 23, 1999
Filing Date:
August 30, 1997
Export Citation:
Assignee:
EIKOO ENJINIARINGU KK
International Classes:
F04D19/04; B01J3/00; C23C16/44; C30B23/08; F04D29/58; H01L21/203; (IPC1-7): F04D29/58; B01J3/00; C30B23/08; F04D19/04
Domestic Patent References:
| JP868389A | ||||
| JP9209932A |
Attorney, Agent or Firm:
Kazuyoshi Hojo