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Title:
【発明の名称】半導体処理のための超高純度薬品の現場混合システムおよび方法
Document Type and Number:
Japanese Patent JP2001527664
Kind Code:
A
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Inventors:
Hoffman, Joe Gee
Clark, Earl Scott
Johns Jr., Allen H.
Application Number:
JP50228597A
Publication Date:
December 25, 2001
Filing Date:
June 05, 1996
Export Citation:
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Assignee:
Startech Ventures Incorporated
International Classes:
G05D11/03; C01B7/19; C01C1/02; C01C1/16; H01L21/306; H01L21/311; (IPC1-7): G05D11/03
Attorney, Agent or Firm:
Takehiko Suzue (4 outside)



 
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