Title:
IC INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPH04314347
Kind Code:
A
Abstract:
PURPOSE: To improve operation efficiency by reducing a device occupation area.
CONSTITUTION: A test head 2 connected from a teseter body 1 through a single cable is made longitudinal, and measuring units 3, 4 making contact with an IC 6 are mounted on opposite surfaces of the test head 2. Handlers 5a, 5b for supplying the IC 6 are disposed at locations corresponding to the measuring units 3, 4.
Inventors:
FUJISHITA TOSHIHIRO
Application Number:
JP7942291A
Publication Date:
November 05, 1992
Filing Date:
April 12, 1991
Export Citation:
Assignee:
KYUSHU NIPPON ELECTRIC
International Classes:
H01L21/66; G01R31/26; (IPC1-7): G01R31/26; H01L21/66
Domestic Patent References:
| JPS6057947A | 1985-04-03 | |||
| JPS6119142A | 1986-01-28 | |||
| JPH0236368A | 1990-02-06 | |||
| JPH01156679A | 1989-06-20 |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)