Title:
IC TEST SYSTEM
Document Type and Number:
Japanese Patent JP3703618
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To do so that a test engineer can deal with troubles even at a place apart from a production field as if he were at the production filed by connecting an isolated IC production line to a command room through a network to provide information acquiring means, communication means, information analyzing means, etc.
SOLUTION: An IC production line 1 is isolated from a command room 2 and these are connected through a network 3. In the production line 1 a personal computer 16 acquires inspection data of an IC tester 11, image information of a camera 14, etc., communicates with the command room 2 through the network 3 and mounts information acquiring means 161, 162, communication means 164, etc. A personal computer 21 in the command room 2 mounts communication means 21, condition reproducing means 212, information analyzing means 213, command generating means 214, etc. Inspection data are reproduced in the command room 2 and thereby a test engineer can recognize the IC inspection result.
Inventors:
Kazuo Ito
Yanagawa Riki
Morita Hidenori
Ryuta Motooka
Yanagawa Riki
Morita Hidenori
Ryuta Motooka
Application Number:
JP3467998A
Publication Date:
October 05, 2005
Filing Date:
February 17, 1998
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01R31/28; H01L21/66; G01R31/26; (IPC1-7): H01L21/66
Domestic Patent References:
| JP9260228A |
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