Title:
Illumination-light study unit
Document Type and Number:
Japanese Patent JP6278528
Kind Code:
B2
Inventors:
Endless Martin
Patra Michael
Patra Michael
Application Number:
JP2015522071A
Publication Date:
February 14, 2018
Filing Date:
July 16, 2013
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2011512659A | ||||
| JP2011503831A | ||||
| JP2008544531A |
Foreign References:
| WO2011060975A1 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi
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