Title:
ILLUMINATION METHOD AND DEVICE, AND EXPOSURE METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2014203905
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To make it possible to obtain a distribution close to a target light intensity distribution in an irradiated surface even when the shape or properties of the reflecting face of the reflecting element of a spatial light modulator is changed.SOLUTION: In an illumination method for guiding illumination light from a light source to an illumination pupil face IPP via a plurality of the mirror elements 16 of a spatial light modulator 14, light from a mirror element 16A arranged in a first array area 52A of the arrangement area of the mirror elements 16 and having a reflection face that is not larger than a reference amount in terms of the amount of curve is guided to the peripheral edge areas 55Aa of partial pupil areas 55A to 55D formed on the illumination pupil face IPP. Also, light from mirror elements 16B, 16C arranged in a second array area 52B different from the first array area 52A and having a reflection face exceeding the reference amount in terms of the amount of curve is guided to the inside areas 55Ab of the partial pupil areas 55A to 55D.
Inventors:
MIZUNO YASUSHI
Application Number:
JP2013077427A
Publication Date:
October 27, 2014
Filing Date:
April 03, 2013
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B5/08; G02B5/10; G02B7/182; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Omori 聡