Title:
照明光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP6583741
Kind Code:
B2
Abstract:
An illumination optical system having high degree of freedom regarding change of polarization state. The illumination optical system for illuminating an illumination objective surface with light from a light source includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane and controlled individually, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a change of a polarization state to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the change of the polarization state being different from a change of the polarization state given to a second light beam passes through a second area in the intersecting plane, the second area being different from the first area; and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane in the optical path on the illumination objective surface side with respect to the first plane or in an optical path on a light source side with respect to the first plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.
Inventors:
Norio Miyake
Kinya Kato
Kinya Kato
Application Number:
JP2017125694A
Publication Date:
October 02, 2019
Filing Date:
June 28, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2010087389A | ||||
| JP2010272640A | ||||
| JP2011114041A | ||||
| JP2009105396A | ||||
| JP2010539695A |
Foreign References:
| WO2011147658A1 |
Attorney, Agent or Firm:
Takao Yamaguchi