Title:
照明光学系、露光装置、露光方法、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP6311949
Kind Code:
B2
Abstract:
An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
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Inventors:
Osamu Yatsu
Hirohisa Tanaka
Kinya Kato
Takashi Mori
Hirohisa Tanaka
Kinya Kato
Takashi Mori
Application Number:
JP2017064279A
Publication Date:
April 18, 2018
Filing Date:
March 29, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B5/00; G03F7/20; G02B5/30; G02B19/00
Domestic Patent References:
| JP2009111223A | ||||
| JP2007053390A | ||||
| JP2010087389A | ||||
| JP2004111579A | ||||
| JP2010272640A | ||||
| JP2009105396A |
Foreign References:
| WO2011021444A1 |
Attorney, Agent or Firm:
Takao Yamaguchi