IMAGE DATA COMPARISON DEVICE

Title:

IMAGE DATA COMPARISON DEVICE

Document Type and Number:

Japanese Patent JPH07260699

Kind Code:

A

Abstract:

PURPOSE: To provide an image data inspection device which can reduce time required for inspection process by easily matching the image dimension of image data for comparison to that of image data to be inspected.

CONSTITUTION: Image data D1 to be inspected being stored at an image memory 7 are compared with image data D3 for comparison generated by a data processing device 15 based on design data D2 by a comparison circuit 13, thus detecting defect data included in the image data D1 to be inspected. In the data processing device 15, basic image data generated in picture element dimensions which are thinner than the image data D1 to be inspected based on the design data D2 and a picture element dimension adjustment circuit 11 is provided for generating the image data D3 for comparison with the equal picture element dimensions as the image data D1 to be inspected based on the basic image data.

More Like This:

JP2023018619	LIGHT-EMITTING ELEMENT ARRAY, OPTICAL DEVICE, OPTICAL MEASUREMENT DEVICE, AND METHOD OF MANUFACTURING LIGHT-EMITTING ELEMENT ARRAY
JPH07240577	METHOD AND DEVICE FOR PACKAGING ELECTRONIC PARTS
JP2001067478	METHOD AND DEVICE FOR INSPECTING MOUNTED COMPONENT

Inventors:

MARUYAMA HIROSHI

Application Number:

JP4926494A

Publication Date:

October 13, 1995

Filing Date:

March 18, 1994

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJITSU LTD

International Classes:

G01B11/24; G01N21/88; G01N21/93; G01N21/956; G06T1/00; G06T7/00; H01L21/66; (IPC1-7): G01N21/88; G01B11/24; G06T7/00; H01L21/66

Attorney, Agent or Firm:

Hironobu Onda

Previous Patent: chemical mechanical polishing pad

Next Patent: FOREIGN OBJECT INSPECTION METHOD