IMAGE PROCESSING DEVICE HAVING PIEZOELECTRIC TRANSCEIVER

Title:

IMAGE PROCESSING DEVICE HAVING PIEZOELECTRIC TRANSCEIVER

Document Type and Number:

Japanese Patent JP2023169292

Kind Code:

A

Abstract:

To provide a micromachined ultrasonic transducer (MUT) including an electrode designed to improve both acoustical and electrical performances of the transducer.SOLUTION: A micromachined ultrasonic transducer (MUT) (720) includes a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode, and an asymmetric top electrode (722) disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode (722) along an axis (742) has a plurality of local maxima, and locations of the plurality of local maxima coincide with locations (726) (728) where a plurality of anti-nodal points at a vibrational resonance frequency is located.SELECTED DRAWING: Figure 7B

Inventors:

SANDEEP AKKARAJU
KWON HAESUNG
BRIAN BIRCUMSHAW

Application Number:

JP2023149820A

Publication Date:

November 29, 2023

Filing Date:

September 15, 2023

Export Citation:

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Assignee:

EXO IMAGING INC

International Classes:

H04R17/00; A61B8/00; H04R19/00

Attorney, Agent or Firm:

Osamu Yamamoto
Toru Miyamae
Junichi Matsuo

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