IMAGE-PROCESSING METHOD

Japanese Patent JP3800208

B2

PROBLEM TO BE SOLVED: To precisely extract a defect in an inspection image without recognizing erroneously as the defect deformation of the inspection image caused by fluctuation of an imaging environment.
SOLUTION: The least square method is applied for linear relations of respective outlines of an instruction image registered preliminarily and the inspection image of a concentration image, and a conversion parameter is thereby calculated to express the deformation of the inspection image with respect to the instruction image (S2-S5). A concentration difference of corresponding picture elements in a deformed image of the instruction image and the inspection image is found based on the found conversion parameter, and the picture element of which the concentration difference exceeds a preset threshold value is extracted (S8,S9). The extracted picture element is used for appearance inspection for the inspection object. An influence of the deformation of the inspection image caused by fluctuation of the image picking-up environment is removed to discriminate the inherent defect in the inspection image.

Yoshihito Hashimoto
Kazutaka Ikeda

JP2003280362A

July 26, 2006

July 25, 2003

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MATSUSHITA ELECTRIC WORKS,LTD.

G01N21/88; G06T1/00; G06T3/00; G06T7/00; G06T7/60; (IPC1-7): G01N21/88; G06T1/00; G06T3/00; G06T7/00; G06T7/60

JP7089063A
JP6185999A
JP2002183713A
JP2001175865A
JP10148515A
JP2000304703A

Keisei Nishikawa
Atsuo Mori

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