PURPOSE: To obtain the clear image signals of IC leads without optical interference of facing lightings, by arranging image sensing means on both sides of the IC so as to face each other, and arranging optical filters, which transmit light beams having the different wavelengths in front of the image sensing means.
CONSTITUTION: Two sets of image sensing means A and B comprising stroboscopes 5 and TV cameras 6 are arranged at positions so as to face an IC leads 2 on both sides of an IC 1. Optical filters, which transmit light beams having the different wavelengths, are arranged in front of the image sensing means A and B. For example, the red optical filter 3 is arranged in front of the image sensing means A; and the green optical filter 4 is arranged in front of the image sensing means B. Even when the image sensing means A and B are simultaneously driven, the image, in which the red stroboscope light and the green stroboscope light are screened, is sensed by the TV camera 6. Therefore, the clear image signals of the IC leads 2 can be obtained without the optical interference of the facing stroboscope lightings.
WO/2023/075598 | THERMAL TEST CHIP |
JPS6411339 | STRESS ANALYSIS OF SEMICONDUCTOR DEVICE |
JP2000082727 | METHOD FOR EVALUATING FAULT OF INSULATING FILM |