Title:
画像振動低減装置
Document Type and Number:
Japanese Patent JP6499871
Kind Code:
B2
Abstract:
PURPOSE: To reduce image reduction in an image vibration reduction device for reducing vibration of an image obtained from a sample.CONSTITUTION: An image vibration reduction device includes: a stage on which a sample is moved in an X direction and a Y direction; and vibration reduction means for reducing vibration of an image on the basis of a first signal detected by a first sensor for detecting vibration or position variation, which is mounted on the stage or the sample mounted on the stage or a holder holding the sample, or a second signal of difference between the detected first signal and a signal detected by a second sensor for detecting vibration or position variation, which is mounted on a pole of an objective lens for finely squeezing electron beams to a sample or on the top plate holding the pole.SELECTED DRAWING: Figure 1
Inventors:
Keizo Yamada
Application Number:
JP2015012127A
Publication Date:
April 10, 2019
Filing Date:
January 26, 2015
Export Citation:
Assignee:
Holon Co., Ltd.
International Classes:
H01J37/22; H01J37/16; H01J37/20; H01J37/28
Domestic Patent References:
| JP4504184A | ||||
| JP2006252800A | ||||
| JP10106466A | ||||
| JP11016815A |
Attorney, Agent or Firm:
Morihiro Okada