Title:
撮像装置
Document Type and Number:
Japanese Patent JP7347793
Kind Code:
B2
Abstract:
An image capturing apparatus for capturing an image of a workpiece held on a chuck table includes a camera, an objective lens having a minute hole defined centrally therein and disposed in facing relation to the workpiece held on the chuck table, an optical fiber having an end inserted in the minute hole in the objective lens, a light source optically coupled to another end of the optical fiber, and a beam splitter disposed in the optical fiber for branching off returning light reflected by the workpiece held on the chuck table. The image capturing apparatus further includes a calculating section for calculating a value representing a height or a thickness of the workpiece on the basis of the returning light branched off by the beam splitter, and a focusing mechanism for focusing the objective lens on the workpiece on the basis of the value calculated by the calculating section.
Inventors:
Keiji Nomaru
Application Number:
JP2019205578A
Publication Date:
September 20, 2023
Filing Date:
November 13, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23K26/03
Domestic Patent References:
| JP2011122894A | ||||
| JP5141961A | ||||
| JP201611896A |
Foreign References:
| US20190091798 | ||||
| US20190226832 | ||||
| US8508748 |
Attorney, Agent or Firm:
Atago Patent Attorneys Office
Naozumi Ono
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
Naozumi Ono
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
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