Title:
撮像方法及び撮像装置
Document Type and Number:
Japanese Patent JP5433775
Kind Code:
B2
Abstract:
(1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.
Inventors:
Atsushi Miyamoto
Wataru Nagatomo
Ryoichi Matsuoka
Morotokuma Hidetoshi
Wataru Nagatomo
Ryoichi Matsuoka
Morotokuma Hidetoshi
Application Number:
JP2012270904A
Publication Date:
March 05, 2014
Filing Date:
December 12, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/22; G03B42/00; H01J37/24
Domestic Patent References:
| JP62026835A | ||||
| JP2001004328A | ||||
| JP2001159616A | ||||
| JP2002328015A |
Foreign References:
| WO2001063660A1 |
Attorney, Agent or Firm:
Manabu Inoue